Equipment features:
● The area density meter and die can form a closed-loop control.
● CCD system with closed-loop control for dimension detection.
● Siemens bus control mode.
● Paste termination tape on the tailing.
● Double layer slurry can be coated on the same side of the substrate.
● Work together with MES system and manage remote cloud control for equipment.

Quality monitoring and feedback:
● Area density meter in X/ β ray for on-line detection.
● CCD system for dimension and flaw detection.
● NG mark ink-jet print.
● Temperature measurement via IR on the surface of electrode inside the oven.
● The mass flow-meter monitors online for the flow, viscosity and temperature.
● NMP concentration monitoring for cathode oven and humidity detection for anode oven.